Abstract: The Houhai area in Nanshan District of Shenzhen is the base of the headquarters building, where the Shenzhen fault zone and the Pearl River Mouth fault zone meet here. In this region, the bedrock is buried deeply, the faults are well developed, and there is huge thick weathered deep trough. Thus, overlength pile foundation is used in high-rise buildings. In this study, the permanent scatterers interferometric synthetic aperture radar technique was used to monitor the settlement of ground and structures in houhai Deep trough research area, Nanshan District, Shenzhen. The monitoring results show that the settlement of buildings and other structures on deep trough is relatively stable, and the pile foundation construction technology in Houhai research area is safe and effective at present. The grassland of Shenzhen Bay Park and its surrounding areas have a large amount of settlement, which is mainly caused by the settlement of soft land reclaimed from the sea. Compared with the traditional monitoring technology, the monitoring accuracy of InSAR technology meets the requirements. The InSAR technology has advantages for large-scale, low-cost, high-precision and high-efficiency deformation monitoring.