Abstract: With the rapid development of modern information technology,the ability to obtain various monitoring information of landslide is becoming stronger and stronger,and the field monitoring data accumulated is also more and more. How to make full use of the monitoring data has become a key issue in landslide monitoring and early warning work. Therefore,soil landslide is taken as the research object in this paper,and the strength reduction finite element method is used to study the temporal-spatial evolution characteristics of surface tilt deformation. It is found that the so-called "rate sequence transition" occurs during the period from sliding surface extension to breakthrough,and the so-called "rate mutation" occurs after the sliding surface passes through. The quantitative correlation between the surface tilt deformation and the internal sliding surface can provide a new perspective and direction for the study of medium and short-term prediction of soil landslides. With the help of theoretical results,this paper further studies the key techniques of surface tilt deformation monitoring,discusses the measurement principle and measurement accuracy of inclination sensor based on MEMS accelerometer,analyzes the influence of environmental temperature difference fluctuation on inclination measurement error,and finally introduces a universal landslide surface tilt deformation monitoring equipment-Shallow deformation measuring instrument for slope.